@article{Sitanov2021the,
author={Sitanov, D.V.},
title={The role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorine},
journal={From Chemistry Towards Technology Step-By-Step},
publisher={Yaroslavl State Technical University},
year={2021},
pages={85-92},
volume={2},
issue={4},
}