%0 Journal Article
%T The role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorine
%A Sitanov, D.V.
%K process, stages, etching, concentration, particles, recombination, plasma
%J From Chemistry Towards Technology Step-By-Step
%D 2021
%N 2
%P 7
%I Yaroslavl State Technical University