00631naa#a2200169#i#4500001001500000005001700015011001400032100004100046102000700087200019100094210005800285215001000343608002700353675002900380700003600409856001600445EN\\bibl\8251720241222154150.7##a2782-1900##a20211223b2021####ek#y0engy0150####ca##aRU1#aThe role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorineeJournal article1#aYaroslavlcYaroslavl State Technical Universityd2021##a8 с.##aJournal article2local##aсредняя. 66-914.5#1aSitanovgDmitry Vyacheslavovich4#acomincon.ru