00631naa#a2200169#i#450# EN\\bibl\82517 20241222153636.7 2782-1900 20211223b2021####ek#y0engy0150####ca RU The role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorine Journal article Yaroslavl Yaroslavl State Technical University 2021 8 с. Journal article local средняя. 66-914.5 Sitanov Dmitry Vyacheslavovich comincon.ru