00656naa#a2200181#i#4500001001500000005001700015011001400032100004100046101000800087102000700095200019100102210005800293215001000351608002700361675003400388700003600422856001600458EN\\bibl\8253020241110032548.7##a2782-1900##a20211223b2021####ek#y0engy0150####ca0#aENG##aRU1#aThe role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorineeJournal article1#aYaroslavlcYaroslavl State Technical Universityd2021##a7 с.##aJournal article2local##aсредняя. 66-914.5zENG#1aSitanovgDmitry Vyacheslavovich4#acomincon.ru