00656naa#a2200181#i#450# EN\\bibl\82530 20240920012553.5 2782-1900 20211223b2021####ek#y0engy0150####ca ENG RU The role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorine Journal article Yaroslavl Yaroslavl State Technical University 2021 7 с. Journal article local средняя. 66-914.5 ENG Sitanov Dmitry Vyacheslavovich comincon.ru