PHYSICAL ASPECTS OF THE CHEMICALLY ACTIVE MEDIUM FORMATION IN CHLORINE PLASMA UNDER PULSE DISCHARGE ENERGIZATION
Abstract and keywords
Abstract (English):
Issledovaniya, predstavlennye v dannoy rabote, rasshiryayut vozmozhnye aspekty tehnologicheskogo ispol'zovaniya gazovyh razryadov v tehnologii obrabotki i modifikacii razlichnyh materialov. Izvestno, chto plazma na osnove himicheski aktivnyh veschestv pozvolyaet intensificirovat' tradicionnye himicheskie processy za schet bolee effektivnogo rashodovaniya energii, podvodimoy k sisteme. Pri takom podhode opredelyayuschimi stanovyatsya vse stadii tehnologii i elementy kineticheskoy shemy vzaimodeystvuyuschih chastic v plazmohimicheskom reaktore. Izucheny processy, nablyudaemye na frontah pereklyucheniya signala pri impul'snom pitanii razryada. Takoy rezhim goreniya razryada pozvolyaet dobit'sya bolee effektivnogo ispol'zovaniya reagentov, primenyaemyh pri plazmohimicheskom travlenii razlichnyh materialov. Takzhe vypolnen obobschennyy analiz prichin, privodyaschih k poyavleniyu perehodnyh processov na frontah pereklyucheniya signala v razryade s periodicheskim izmeneniem toka. Rassmotreny voprosy relaksacii tyazhelyh zaryazhennyh i neytral'nyh chastic v plazme hlora.

Keywords:
plazma, vzaimodeystvie, process, perehodnye processy, hlor, kremniy
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References

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